Polyoxometalates of tantalum and niobium were studied as potential precursors for the solution based processing of M2O5 thin films, where M = Ta or Nb. The polyoxometalates were characterized in the solid state with Raman and infrared spectroscopy, thermogravimetric analysis, scanning electron microscopy with energy dispersive X-ray spectroscopy, and X-ray diffraction.  The precursor solutions of the same polyoxometalates were characterized via small and wide angle X-ray scattering, and Raman spectroscopy.  The precursor solutions were used to deposit thin films of M2O5 by spin coating under ambient conditions.  Precursor solution concentration and the annealing temperatures were varied to study the effect on thin film quality, thickness, and density.  X-ray reflectivity was used to determine film density, thickness, and roughness. Ellipsometry measurements of film thickness and roughness were compared to reflectivity results.  X-ray diffraction was used to verify the phases of the films.  The films were imaged using cross sectional scanning electron microscopy.

Polyoxometalates for solution based processing of M<sub>?2</sub>?O<sub>?5</sub>? (M = Ta, Nb) thin films

248th National Meeting (2014)

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Polyoxometalates for solution based processing of M?2?O?5? (M = Ta, Nb) thin films

Polyoxometalates for solution based processing of M_?2?O_?5? (M = Ta, Nb) thin films