CMOS-based implantable optoelectronic devices are presented. CMOS technology has been attracting interests and expectations as a functional core of implantable microelectronics, because of its potential capability to sense and handle electricity and light. In this work, we present an implantable glucose sensor based on an implantable image sensor technology and ultra-small implantable optogenetic neural stimulator based on an integrated optical power transfer technology.<br/>The implantable glucose sensor was relized by combining a small-sized implantable CMOS image sensor with glucose-resposive fluorescent hydrogel. We integrated the image sensor, an on-chip optical filter, the fluorescent hydrogel and UV LED on a flexible substrate. Then a polyimide tube with opening windows was attached to the head of the sensor device. The glucose sensor is operated in wired configuration. We have successfully demonstrated the glucose-sensing capability in both in vitro and in vivo experiments.<br/>The ultra-small optogenetic stimulator is a wireless blue-light emitting device that is operated by light. It has integrated solar cells that can receive light and generate electricty. Since red or infrared (IR) light penetrate into biological tissues, we can place the device below skin or skull of experimental animals to perform in vivo optogenetic experiments. Since CMOS LSIs are made of Si semiconductor technology, we can design multiple PN junction structure on CMOS chips. We designed a CMOS chip has not only an array of the on-chip solar cells, but also a voltage-detection circuit that controls the operation of blue LED. On the basis of this idea, we can realize the implantable optogenetic stimulator with a volume of 1mm3, and a weight of 2.3 mg. We have successfully operated device with IR light and obtained blue light emission with sufficient intensity for major part of optogenetic applications.

Implantable optoelectronic devices based on CMOS LSI technology

2019 Fall National Meeting

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