Focused electron beam induced deposition (FEBID) and focused ion beam induced deposition (FIBID) can create metal-containing nanostructures by using charged particles to induce local decomposition of organometallic precursors.  We are using mechanistic insights from electron- and ion-induced reactivity on surfaces to design organometallic precursors specifically for FEBID and FIBID.  Synthesis of the candidate precursor complexes and evaluation of their reactivity with electrons and ions under UHV and steady state deposition conditions allows us to identify privileged ligands for use in FEBID and FIBID.  Examples will be taken from deposition of Ru, Au, Pt and alloys.

Organometallic precursors for FEBID and FIBID of nanostructures

Macromolecular Chemistry: The Second Century

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ACS Spring 2020 National Meeting & Expo

The official archive and repository for all ACS Meetings & Expositions abstracts and select posters or presentations.