Physical vapor deposition can produce glasses with varying thermodynamic and kinetic stabilities. We studied the structure and properties of Zr-Cu-Al and Zr-Cu-Ni-Al thin films synthesized by single-target direct current magnetron sputtering as a function of deposition parameters. For both compositions, we found a pseudo-phase boundary between amorphous and crystalline films as a function of substrate temperature and deposition rate. A semi-quantitative model based on surface-diffusion limited crystallization predicts the line in temperature-rate space dividing amorphous from crystalline growth. Kinetic stability in Zr65Cu27.5Al7.5 metallic glass thin films, as indicated by their glass transition temperature, was widely varied by changing deposition rate at constant temperature. The most kinetically stable film‚Äôs reduced modulus was 20% higher than a glass of the same composition quenched from the liquid by melt spinning, consistent with increased density and improved thermodynamic stability. Fluctuation electron microscopy and angular correlations in coherent electron nanodiffraction show that glasses with enhanced stability have increased nanoscale structural order, especially icosahedral medium range. Our results indicate that increased nanoscale icosahedral order contributes to resistance of glass to both glass transition and mechanical deformation.

Sputtering of Zr-based metallic glasses to vary kinetic stability, icosahedral ordering and mechanical properties

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