Multiphoton absorption polymerization (MAP) makes possible the fabrication of 3D structures of arbitrary complexity with sub-100-nm transverse resolution.  We have recently developed an extension of MAP known as Resolution Augmentation through Photo-Induced Deactivation (RAPID) lithography. RAPID enables 3D fabrication with resolution of 40 nm in all dimensions.  In this talk we will describe recent advances in RAPID lithography, both in materials and optics, that promise to significant new capabilities for 3D nanofabrication.

3D nanofabrication with RAPID lithography

239th National Meeting (2010)

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