In the present study, the parameter set of surface energy of substrate and the BCP film thickness is systematically controlled by employing a new concept to control the surface energy of spin-on organosilicate (OS) glass and by varying the thickness of PS-b-PMMA thin films on the OS substrates. Experimentally observed BCP orientation as well as quantitative analysis of the contributing surface energy terms allows us to establish more accurate process windows for the vertically oriented BCP films. As an excellent example to utilize present process windows, the approach to improve alignment of BCP nanostructures on the chemically pre-defined region is introduced. Finally, we will show the simple method to align BCP nanostructures with OS materials by using soft-lithographic technique as well as sequential cure protocols for tuning of surface energy of OS templates.

Control of surface energy of organosilicates for block copolymer thin film orientation

241st National Meeting (2011)

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