Sensitive nitric oxide (NO) sensors are very important for engine emission, environmental, and human breath monitoring. An Indium Tin Oxide (ITO) thin film NO microsensor has been developed. The sensor has a simple but robust structure. A platinum interdigitated electrode structure was microfabricated to maximize the sensor signal output. The ITO thin film was sputter deposited on electrodes as a sensing material. Detection of NO concentrations from parts per billion to parts per million at 450�C was demonstrated. The microsensor has the advantages of high sensitivity, wide detection range, small size, simple batch fabrication, high sensor yield, low cost, and low power consumption due to its microsize. The next step will be to develop nano-sized NO sensing material, which is expected to further decrease the NO detection limit and reduce the power consumption. Comparison of the thin-film ITO and nanosized ITO sensing materials will be conducted.

Nitric oxide microsensors for engine emission, environmental, and human breath monitoring applications

242nd National Meeting (2011)

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