It is known that owing to high sputtering yield, cluster ions like C60+ produce more high-mass secondary ions and yield less damaged in the remaining surface than atomic ion sputtering. However, in some polymer, damage still accumulates with C60+ sputtering, so that subsequently acquired chemical information during depth profile can be different from its initial state. Beside of using different type of primary ion and mixed ion co-sputtering of different fluence, the effect of specimen temperature to the depth profile of organic materials is examined in this work. The ion beam induced change in the chemical structure of modeling polymers including polyimide (PI) and polymethylmethacrylate (PMMA) at different temperatures was examed by X-ray Photoelectron Spectroscopy (XPS) and Dynamic-Secondary Ion Mass Spectrometry (D-SIMS). At lower temperature (150 K), because the energy of primary was dissipated more quickly than that at room temperature, less damage to the chemical structure and higher secondary ion intensities is observed. It was also found that unlike the general observations at room temperature, atomic Ar+ sputtering introduced less damage to the chemical structure in the remaining surface and the secondary ion intensities of high-mass fragments are higher than C60+ based sputtering. This unexpected behavior is attributed to the more significant carbon deposition resulting from C60+ bombardment where the deposited carbon lowered the sputter yield.

Effect of specimen temperature on C60+-Ar+ co-sputtering of polymers

243rd National Meeting (2012)

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