Polybenzoxazoles (PBO ) are known to have excellent mechanical strength and thermal stability. However, the poor solubility of PBO  hinders the application of PBO . To enhance the solubility of PBO  precursor, here we introduced tert-butoxycarbonyl group to the PBO  precursor by two-step reaction in common organic solvent such a NMP. The obtained PBO  precursor (t-Boc-prePBO ) shows excellent solubility to common organic solvent and the PBO films were successfully obtained by the heating of the films and properties of the PBO films were evaluated.

Development of porous polybenzoxazole films using <i>tert</i>-buthoxycarbonyl group as a pore generator for patternable low dielectric constant materials

244th National Meeting (2012)

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Development of porous polybenzoxazole films using tert-buthoxycarbonyl group as a pore generator for patternable low dielectric constant materials