We utilized plasma polymerization, a conformal coating technique, to optimize new solid electrolyte films for next-generation microbatteries.  Thin film batteries must cover areas >1cm2 to store sufficient energy to power microdevices.  To decrease their areal footprint while delivering reasonable capacities and rates, next-generation microbatteries require 3-D micro-architectured electrodes.   Paramount to the function of new high surface-area 3-D battery architectures are solid electrolyte coatings, deposited conformally over large aspect-ratio arrays.  We chose ion-conducting polyethylene oxide (PEO) as our model electrolyte.  Using tetraglyme as a gas-phase precursor, reaction conditions for plasma-phase deposition of PEO-like films are explored via XPS.  A broad range of functional compositions were produced, ranging from lightly cross-linked PEO-like films to highly cross-linked hydrocarbon films.  These films readily intercalate lithium ions from solution, and show excellent electron resistance and high ionic conductivity.  This fulfills the requirements for solid electrolyte films, enabling the construction of complete 3-D batteries.

Plasma polymerized PEO-like electrolyte coatings for high aspect ratio electrodes in 3D Li-ion microbatteries

244th National Meeting (2012)

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