Nanometrology and nanomanufacturing processes based on atomic force microscopy (AFM) are increasingly being used in industry as they allow for quantitative measurement and patterning of feature sizes than cannot be accessed via optical methods. With this increased use of AFM in industrial processes, the mechanical durability of AFM tips has become a key concern.  We have quantified the wear of diamond-like-coated AFM probes using a combination contact-mode scanning, transmission electron microscopy, and inverse imaging.  The wear was quantified under varying loads on the tip and the wear rate was observed to vary linearly with average compressive stress in the tip-sample contact.  Details of the experimental methods, mechanics analysis of the contacts, and results will be presented.  Possible mechanisms for the observed wear will also be discussed.

Nanoscale wear of diamond-like-carbon coated AFM probes

244th National Meeting (2012)

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