�-ketoiminato ligands have been synthesized by the condensation reaction of acetylacetone with primary amines. The reaction of tetrakis(dimethylamino)hafnium(IV) with �-ketoiminato ligands resulted in complexes having potential to serve as precursors for MOCVD of HfO2 thin films. Bis[(Z)-4-(2,6-dimethylphenylamino)pent-3-en-2-ona]bis(dimethylamido)hafnium(IV) (1 ) and [(Z)-4-(4-methylphenylamino)pent-3-en-2-ona]bis(dimethylamido)hafnium(IV) (2 ) were synthesized and characterized by elemental analysis, melting point, 1H NMR, 13C NMR, XRD, and mass spectrometry. Complexes 1  and 2  melt at low temperatures and possess thermal properties that are promising for MOCVD of HfO2 and related oxynitride thin films.

Synthesis and characterization of hafnium (IV) beta-ketoiminates as potential precursors for the MOCVD of hafnium oxide

244th National Meeting (2012)

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