Magnesium diboride, MgB2, has the highest known critical temperature (Tc = 39K) among conventional superconductors. To date, several single source CVD precursors for the deposition of MgB2 and carbon doped MgB2 thin films have been reported. However, these precursors result in unsatisfactory thin films, often due to the depletion of magnesium or the incorporation of too much carbon. A new CVD precursor, the magnesium methylborohydride DME adduct, Mg(H3BCH3)2(DME), was synthesized and was found to be volatile at 80 oC under 10 mtorr. Mg(H3BCH3)2(DME) as well as the calcium, strontium, and barium analogs will be presented.

Synthesis of magnesium methylborohydride and its alkaline earth analogs for use as chemical vapor deposition precursors

246th National Meeting (2013)

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