Two new room temperature processes for spontaneous nanostructure formation by focused charged particles in reactive gaseous environments will be presented. Both processes are fundamentally different from conventional gas mediated focused charged particle beam deposition. Firstly, the growth of complex 3D Ga-filled micropillars formed via a bottom-up self-ordering process will be described. These micropillars arise from a number of distinct physical and chemical interactions occurring during focused ion beam bombardment of III-V solids in a reactive gaseous environment. A pre-seeding step allows the formation of micropillar arrays. Secondly, a method for the synthesis of highly porous, nanocrystalline platinum films based on fluorine-mediated decomposition of Pt(PF3)4 adsorbates will be discussed. Pure platinum deposition results from a spontaneous reaction in the presence of the gas phase precursors. Spatial localization is achieved by functionalizing substrate surfaces via charged particle beam induced pre-fluorination.

Spontaneous nanostructure assembly with new focused charged particle beam-induced processes

247th National Meeting (2014)

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