Although current microfabrication technologies, such as standard lithographic and printing techniques, have proved to be very successful in many cases, they still present several limitations. For instance, creating multipolymeric patterned surfaces where different chemistries are involved, and with a good adhesion among the layers, is a very challenging task. Herein, we describe the Oxygen-Inhibition Lithography (OIL), a photolithographic technology that exploits the inhibitory effects of oxygen during UV-curing in air to fabricate multiscale and multimaterial patterns and devices. Exposure time, UV light intensity and material chemistry are selected as critical variables to finely control the formation and the thickness of the inhibition layer; as a result, a simultaneous control over pattern shape, dimensions and composition is achieved. OIL is a general patterning route for a broad range of polymers, and allows the selection of the final properties of the structures on demand, depending on the application. We demonstrate the manufacturing in few minutes of both patterns with varied and complex shapes and closed devices (with embedded structures).<br/>The key feature of OIL is the possibility to combine different properties within the same structure and tune the physico-chemical characteristics of each layer of the device accordingly to the desired application, thus granting a precise and concurrent control over surface topography and pattern functionality. Multifunctional and multipolymeric structures and devices containing different compositions can be easily fabricated with high reproducibility, low cost and very rapidly.

Oxygen-inhibition lithography for the fabrication of multipolymeric structures and multifunctional devices

251st National Meeting (2016)

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