Our attempts to develop new precursor chemistries for ALD of transition metal oxides using mixed oxygen-nitrogen or all nitrogen coordinated ligands has revealed distinct influence on the precursor characteristics. Of particular interest are the ketominate based compounds of iron and cobalt which are reactive towards water as well as thermally stable meeting the prerequisites for ALD applications. In addition new tungsten compounds bearing the amidinate class of ligands were developed which seem promising for ALD. The focus of this talk will be to elucidate with examples the knowledge gained on the relationship between the molecular structure and the thermal properties of the metalorganic complexes of iron, cobalt and tungsten.<br/>

New precursor chemistries for ALD of transition metal oxides

253rd National Meeting (2017)

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