We are developing a non-destructive evaluation method of glass nanopipette with the inner diameter less than several hundred nanometers by measuring the vacuum conductance of rare gas or nitrogen gas through the nanopipette. For example, a glass nanopipette with an inner diameter of 100nm was set between vacuum chambers, and argon gas was introduced from the top of the nanopipette to the bottom. The exit pressure was monitored with an increase in entrance pressure in the range of 50–170 kPa. Knudsen flow was observed at an entrance pressure lower than 100 kPa, and Poiseuille flow was observed at an entrance pressure higher than 120 kPa. The proposed pressure-dependent gas flow method provides a means of evaluating the glass nanopipette before using it for various applications including nanodeposition to surfaces and femtoinjection to living cells.

Development of gas flow method for the non-destructive evaluation of glass nanopipette

254th National Meeting (2017)

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