Mass spectrometric imaging has attracted increasing interest in the last two decades. Secondary ion mass spectrometry (SIMS) is a unique surface analysis technique because of its super-high sensitivity (down to ppb level), decent lateral resolution (down to 50 nm), as well as elemental/isotopic/molecular recognition capabilities. Traditionally, SIMS is a depth profiling tool with sub-ppm sensitivity and sub-nanometer depth resolution, making it the best tool to track trace doped elements in semiconductors. Recent years, applications of SIMS have been greatly expanded in 2-dimensional and 3-dimensional chemical imaging. Compared to other mass spectrometric imaging tools, the most unique capability of SIMS imaging is its decent spatial resolution. For example, Nanoscale SIMS (NanoSIMS) imaging can provide a lateral resolution down to 50 nm. In addition, in situ liquid SIMS enabled by System for Analysis at the Liquid Vacuum Interface (SALVI) was developed in Pacific Northwest National Laboratory since 2011, which allows us to not only image live biological samples, but also follow dynamic evolution of electrode-electrolyte interface. In this presentation, history, principle, and major applications of SIMS imaging will be discussed.  A brief introduction of in situ liquid SIMS development will also be presented.

Nanoscale chemical imaging using secondary ion mass spectrometry

254th National Meeting (2017)

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