Crystalline silicon has been the material of choice for the ever smaller, faster and cheaper transistors for over 50 years. In this talk, I will give an overview of amorphous silicon, in the form of polymers, as an enabling materials platform for modern microchip manufacturing. I will discuss synthesis of silicon-containing polymers and their applications as photosensitive active patterning materials, as light-absorbing anti-reflective coatings and as permanent on-chip photo-patternable dielectric materials. These silicon-containing polymers have been commercialized and adopted for high-volume manufacturing of several generations of microchips.  They have also enabled a new chip-making technology called multiple patterning that are indispensable for making some of the most popular electronic devices in the world today.<br/>

Si-containing polymers for nanoelectronics: From synthesis to applications in high-volume microchip manufacturing

255th National Meeting (2018)

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