Modern semiconductors are “printed” under water using 193nm light using a technology called Immersion Lithography. My presentation will focus on key innovations in photoresist materials and imaging mechanisms that led the industry to this point and have created such ubiquitous technology and impact. Polymer chemistry has been a key component that enabled continual advancement in semiconductors.

Polymer chemistry history: The development of modern photoresists

256th National Meeting (2018)

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