Tungsten(VI) oxo alkoxide complexes with β-iminoesterate/β-ketoiminate ligands were synthesized as precursors for chemical vapor deposition (CVD) of WOx films. Thermal properties and decomposition mechanisms of these precursors were investigated by thermogravimetric analysis, analysis of pyrolysis products and mass spectrometry. Growth of tungsten oxide thin films by aerosol-assisted chemical vapor deposition (AACVD) from these precursors and the properties of the deposited films will be discussed.

Design and synthesis of WO(OR)3L precursors for chemical vapor deposition of WOx films

256th National Meeting (2018)

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