Focused Electron Beam Induced Deposition (FEBID) is an emerging lithographic technique with broad applications in nanofabrication. Deposition from organometallic precursors initiates when an electron beam impinges on a surface containing adsorbed precursor molecules, leaving behind a metallic deposit while volatile fragments (ligands) are carried away under vacuum. Gold nanostructures fabricated by FEBID are a high commodity as a limitless array of 3D structures can be generated for plasmonic applications, however, high purity deposits are required. Commercial organometallic precursors used to produce gold deposits are undesirable since ligand deposition occurs simultaneously. Aimed to address this, we have designed and synthesized a series of Au(I) precursors containing one anionic ligand (Cl, Br, I, CF<sub>3</sub>) and one 2 electron donor ligand (isocyanide, phosphine, phosphite). The ligand effects on precursor properties and model FEBID experiments will be discussed.

Ligand effects in Au(I) precursors for focused electron beam induced deposition

2019 Spring National Meeting

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