Tungsten oxide (WOx) has been shown to be a promising material for lithium-ion batteries and gas sensors. Chemical vapor deposition (CVD) is an attractive technique for producing conformal and uniform WOx materials. Partially fluorinated tungsten oxo alkoxide complexes with fluorinated β-diketonate/β-ketoesterate ligands were synthesized, characterized and used as precursors for CVD of WOx materials. Effects of fluorination in the alkoxide and in the β-diketonate/β-ketoesterate ligand will be discussed.

Synthesis and evaluation of fluorinated tungsten (VI) oxo-alkoxide complexes as precursors for the chemical vapor deposition of WOx thin films

2019 Spring National Meeting

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