Recent advances in understanding the mechanisms of surface reactions for metal deposition and etching will be highlighted. Atomic layer etching of cobalt surfaces will be used as an example of understanding the fundamentals of metal ethign mechanisms, and deposition of silver and platinum will be described for potential applications in catalysis, where the control of the deposited metal nanoparticles is extremely important. We will utilize microscopic techniques, including electron microscopy and atomic force microscopy, to follow the morphology of the materials and surfaces. We will utilize surface analytical techniques (including vibrational spectroscopy, X-ray photoelectron spectroscopy, and thermal desorption) to follow the formation and evolution of surface species, and we will suplement these findings with density functional theory computations to understand the mechanisms of surface reactions. A number of misconceptions about the mechanisms of surface dry etching will be investigated and the readmap for further understanding of these processe will be proposed.

Surface chemistry of metal deposition and atomic layer etching

2019 Spring National Meeting

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