Tungsten oxynitride (WOxNy) is a material of interest because it is expected to combine the mechanical properties of tungsten nitride and the corrosion-resistance of tungsten oxide. In addition, nitrogen doping of wide band gap transition metal WO3 can induce the band gap narrowing, which enables WOxNy to be used as a photocatalyst for water splitting. The tungsten nitrido tert-butoxide complex WN(OtBu)3 was synthesized and tested as a precursor for aerosol-assisted chemical vapor deposition (AACVD) of WOxNy films. Characterization of the resulting material with XRD, XPS and SEM will be discussed.

Synthesis and characterization of a tungsten nitrido tert-butoxide complex as a precursor for aerosol-assisted chemical vapor deposition of WOxNy films

2019 Spring National Meeting

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