High fidelity deposition of polymer thin films can be achieved through control over interfacial interactions leading to selective spin dewetting. While this approach sometimes leads to spatial localization on topographic and chemical patterns, the connection between material selection, process parameters, and resulting film characteristics remains poorly understood. Here, we demonstrate that accurate control over these parameters allows imperfect trichlorosilane self-assembled monolayers (SAMs) to induce spin dewetting on both homogeneous (SiO2) and heterogeneous (Cu/SiO2 or TiN/SiO2) surfaces. Glassy polymers were shown to undergo a sharp transition from uniform wetting to complete dewetting, depending on spin speed, solution concentration, polymer molecular weight, and SAM chemistry. Under optimal conditions, spin dewetting on line-space patterns results in the selective deposition of polymer over regions not functionalized with SAM. The insights described herein clarify the importance of different variables involved in spin dewetting and provide access to a versatile strategy for patterning polymeric thin films.

Rapid and selective deposition of patterned thin films via spin coating

2019 Fall National Meeting

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