<br/>Display glass is the preferred substrate for fabricating flat panel displays (FPDs), which are found in TV’s, phones, mobile gaming devices, etc. Surface hydroxyls are the most important reactive group at display glass surfaces. They can play a governing role in physisorption of water, and they are important for thin-film deposition of metals, polymers, and oxides. Understanding glass surface hydroxylation is key to improving FPD device yields and addressing the increasingly demanding challenges of FPD fabrication. In this presentation, we present surface hydroxyl measurement on multicomponent glass substrates using time-of-flight secondary ion mass spectrometry (ToF-SIMS). In particular, to perform these measurements on production-line samples, we must understand how adventitious hydrocarbon contamination influences these measurements, and whether it is even feasible to measure surface hydroxylation on these non-ideal surfaces. We present experimental data from clean surfaces, surfaces contaminated with adventitious hydrocarbons, and surfaces intentionally dosed with deuterated hydrocarbons, and show their impact on ToF-SIMS surface hydroxyl measurements.

Surface hydroxylation of display glass analyzed by time-of-flight secondary ion mass apectrometry

2019 Fall National Meeting

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