In Manufacturing processes, there are some process variables which are difficult to be measured. Soft sensor was developed in order to predict behavior of process variables and to control overall process. In thin-film PV (photovoltaic), layers are deposited by CVD (Chemical Vapor Deposition) process on the glass. There are some relations between deposition temperature of glass and efficiency of PV, but the temperature of glass is difficult to be measured directly in vacuum process. To predict the temperature of glass and to control the efficiency, we developed a soft sensor in CVD process. In OLED (Organic Light Emitting Diode) lighting device, there are quality specifications such as brightness, driving voltage and color etc. But they have a trade-off relationship, so it is difficult to decide operating condition. To control and improve the quality of OLED lighting devices, we developed the method to decide operating condition.

Prediction and control of vacuum deposition process by data-driven method

2019 Fall National Meeting

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