Solution phase photochemical experiments on various (diene)Ru(CO)3 complexes have resulted in loss of both diene and CO, making them attractive precursors for photochemical deposition. Quantum yields for loss of a single CO or diene ligand were determined for the (diene)Ru(CO)3 complexes. Acyclic (1,3-butadiene and isoprene), antiaromatic (cyclobutadiene), and cyclic (1,3-cyclohexadiene) diene complexes were studied to determine the influence of the diene on photochemical decomposition. Very little luminescence was observed for the compounds, demonstrating that radiative decay of the excited states was not competitive with their photochemical reactions. The photochemistry will be discussed in the context of precursor design for photochemical deposition techniques.

Photochemistry of (diene)Ru(CO)3 precursors for photoassisted chemical vapor deposition

ACS Spring Meeting 2021

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