Most micro-electromechanical resonator designs are based on linear resonant operation of micro-structures vibrating in flexural or torsional modes. Novel microresonators that utilize Ã”Ã¸Î©internal resonanceÃ”Ã¸Î© phenomena and nonlinear interactions in structural modes are described. The focus is on systems with 1:2 and 1:3 internal resonances between two structural modes and their nonlinear interactions in the presence of nonlinearities. A technique for design of such resonators is described and few specific cases, including the beam-type designs Ã”Ã¸Î© the T-resonator, the pedal resonator, and plate-type designs, are described. Detailed analytical modeling includes inertial quadratic, and stretching and curvature cubic nonlinearities, electrostatic potential, and effects of thermal pre-stress. Lagrangian formulation and nonlinear two-mode reduced-order models are used to investigate possible static pull-in limits as well as nonlinear resonant dynamics with mass-sensing applications. Uncertainty Quantification and Sensitivity Analysis techniques are applied to understand the most significant geometric design parameters affecting the performance of the resonators.


7-1-2: Dynamics, Vibration, and Control Plenary Session II

Division / Sponsors: 
Aerospace, Bioengineering, Applied Mechanics, Design Engineering Division, Advanced Energy Systems, Manufacturing Engineering Division, Noise Control and Acoustics, Nondestructive Evaluation, Diagnosis, and Prognosis (NDPD), Nuclear Engineering Division, Process Industries Division, Fluids Engineering, Heat Transfer, Materials, Microelectromechanical Systems, Safety Engineering and Risk Analysis, Computers & Information in Engineering


Paper Proceedings: https://asmedigitalcollection.asme.org/IMECE/IMECE2020/volume/84478

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