Precursors required for metal organic chemical vapor deposition (MOCVD) processes should provide exact stoichiometric control and low deposition temperatures. Furthermore, MOCVD precursors using alkaline earth metals and bismuth are a synthetic challenge given their hygroscopic character. The perfluoro-tert-butanol (PFTB) ligand has proven successful in the synthesis of alkaline earth MOCVD precursors by limiting aggregation through M-F interactions. Here we present the synthetic procedures and results for a novel series of heterobimetallic alkaline earth-bismuth MOCVD precursors using the PFTB ligand and the homometallic bismuth-PFTB complounds.

Synthesis and characterization of heterobimetallic perfluorinated alkaline earth bismuthaAlkoxides

ACS Fall 2021

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