<p style="text-align: justify">Advanced applications for human-robot interaction require perception of physical touch in a manner that imitates the human tactile perception. Feedback generated from tactile sensor arrays can be used to control the interaction of a robot with their environment and other humans. In this paper, we present our efforts to fabricate piezoresistive organic polymer sensor arrays using PEDOT: PSS or poly (3,4-ethylenedioxythiophene)-poly(styrenesulfonate). Sensor are realized as strain-gauges on Kapton substrates with thermal and electrical response characteristics to human touch. In this paper, we detail fabrication processes associated with a Gold etching technique combined with a wet lift-off photolithographic process to implement a circular tree designed sensor microstructure in our cleanroom. The testing of this microstructure is done on a load testing apparatus facilitated by an integrated circuit design.&nbsp; Furthermore, a lamination process is employed to compensate for temperature drift while measuring pressure for double-sided sensor substrates. Experiments carried out to evaluate the performance of the fabricated structure, indicates 100% sensor yields with the updated technique implemented.</p><p style="text-align: justify">In this paper, we investigated new sensor geometries fabricated in the cleanroom using Gold etchant and wet etching photolithographic techniques to produce improved yields and consistent robotic skin sensor patches and also present and explain the results and evaluate the performance of the Skin sensors during the application of different force load</p>

Organic Piezoresistive Robotic Skin Sensor Fabrication, Integration and Characterization

Paper Proceedings: https://asmedigitalcollection.asme.org/MSEC/MSEC2021/volume/85062

2021 International Manufacturing Science and Engineering Conference (MSEC2021)

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