This paper deals with the amplitude-frequency response of primary resonance of electrostatically actuated MEMS (microelectromechanical systems) circular membrane. The system consists of a flexible membrane parallel and at a gap distance from a ground plate, and under an AC voltage of frequency near half of the natural frequency of the membrane. The AC voltage between the membrane and the ground plate creates an electrostatic force that will produce the vibration of the membrane. The MEMS circular membrane is fixed on its boundary. Only axisymmetrical vibrations are investigated. The forces acting on the system they are electrostatic force and damping. The effect of voltage in damping on the amplitude-frequency response are reported as well.This paper deals with the amplitude-frequency response of primary resonance of electrostatically actuated MEMS (microelectromechanical systems) circular membrane. The system consists of a flexible membrane parallel and at a gap distance from a ground plate, and under an AC voltage of frequency near half of the natural frequency of the membrane. The AC voltage between the membrane and the ground plate creates an electrostatic force that will produce the vibration of the membrane. The MEMS circular membrane is fixed on its boundary. Only axisymmetrical vibrations are investigated. The forces acting on the system they are electrostatic force and damping. The effect of voltage in damping on the amplitude-frequency response are reported as well.This paper deals with the amplitude-frequency response of primary resonance of electrostatically actuated MEMS (microelectromechanical systems) circular membrane. The system consists of a flexible membrane parallel and at a gap distance from a ground plate, and under an AC voltage of frequency near half of the natural frequency of the membrane. The AC voltage between the membrane and the ground plate creates an electrostatic force that will produce the vibration of the membrane. The MEMS circular membrane is fixed on its boundary. Only axisymmetrical vibrations are investigated. The forces acting on the system they are electrostatic force and damping. The effect of voltage in damping on the amplitude-frequency response are reported as well.This paper deals with the amplitude-frequency response of primary resonance of electrostatically actuated MEMS (microelectromechanical systems) circular membrane. The system consists of a flexible membrane parallel and at a gap distance from a ground plate, and under an AC voltage of frequency near half of the natural frequency of the membrane. The AC voltage between the membrane and the ground plate creates an electrostatic force that will produce the vibration of the membrane. The MEMS circular membrane is fixed on its boundary. Only axisymmetrical vibrations are investigated. The forces acting on the system they are electrostatic force and damping. The effect of voltage in damping on the amplitude-frequency response are reported as well.

Frequency Response of Primary Resonance of Electrostatically Actuated MEMS Circular Membranes

Paper Proceedings: https://asmedigitalcollection.asme.org/IMECE/IMECE2021/volume/85543

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