<p align="left" class="MsoNormal" style="text-align: left; line-height: 14.25pt; background: #FAFAFA">The&nbsp;existing&nbsp;micro-motion&nbsp;stage&nbsp;based&nbsp;on&nbsp;flexure&nbsp;hinge&nbsp;can&nbsp;hardly&nbsp;meet&nbsp;the&nbsp;requirements&nbsp;of&nbsp;a&nbsp;high-precision&nbsp;stage&nbsp;with&nbsp;large&nbsp;stroke&nbsp;and&nbsp;variable&nbsp;operating&nbsp;conditions&nbsp;(especially&nbsp;variable&nbsp;frequency&nbsp;operation).&nbsp;In&nbsp;this&nbsp;paper,&nbsp;a&nbsp;flexible&nbsp;hinge&nbsp;micro-motion&nbsp;stage&nbsp;with&nbsp;adjustable&nbsp;stiffness&nbsp;is&nbsp;presented.&nbsp;A&nbsp;wide&nbsp;range&nbsp;of&nbsp;stiffness&nbsp;and&nbsp;frequency&nbsp;adjustments&nbsp;are&nbsp;realized&nbsp;by&nbsp;changing&nbsp;the&nbsp;length&nbsp;of&nbsp;the&nbsp;flexure&nbsp;hinge&nbsp;through&nbsp;the&nbsp;movement&nbsp;of&nbsp;the&nbsp;support.&nbsp;However,&nbsp;the&nbsp;change&nbsp;on&nbsp;the&nbsp;stiffness&nbsp;of&nbsp;the&nbsp;flexure&nbsp;hinge&nbsp;is&nbsp;non-linear&nbsp;when&nbsp;is&nbsp;in&nbsp;large&nbsp;deformation.&nbsp;It&nbsp;is&nbsp;difficult&nbsp;to&nbsp;use&nbsp;the&nbsp;traditional&nbsp;PID&nbsp;algorithm&nbsp;to&nbsp;control&nbsp;such&nbsp;nonlinear&nbsp;system&nbsp;without&nbsp;the&nbsp;complete&nbsp;mathematical&nbsp;model,&nbsp;and&nbsp;much&nbsp;more&nbsp;complicated&nbsp;control&nbsp;strategies&nbsp;are&nbsp;required&nbsp;to&nbsp;deal&nbsp;with&nbsp;the&nbsp;condition&nbsp;of&nbsp;large&nbsp;deformation&nbsp;of&nbsp;the&nbsp;flexure&nbsp;hinge.&nbsp;In&nbsp;this&nbsp;paper,&nbsp;the&nbsp;active&nbsp;disturbance&nbsp;rejection&nbsp;control&nbsp;(ADRC)&nbsp;strategy&nbsp;is&nbsp;adopted&nbsp;to&nbsp;solve&nbsp;the&nbsp;above&nbsp;non-linear&nbsp;control&nbsp;problem&nbsp;without&nbsp;relying&nbsp;on&nbsp;the&nbsp;complete&nbsp;system&nbsp;model.&nbsp;A&nbsp;novel&nbsp;model-compensated&nbsp;ADRC&nbsp;based&nbsp;on&nbsp;the&nbsp;dynamic&nbsp;characteristics&nbsp;is&nbsp;proposed&nbsp;to&nbsp;further&nbsp;improve&nbsp;the&nbsp;performance&nbsp;of&nbsp;the&nbsp;micro-motion&nbsp;stage.&nbsp;Experiments&nbsp;show&nbsp;that&nbsp;the&nbsp;ADRC&nbsp;with&nbsp;model&nbsp;compensation&nbsp;(MADRC)&nbsp;can&nbsp;achieve&nbsp;high&nbsp;positioning&nbsp;and&nbsp;tracking&nbsp;precision&nbsp;faster&nbsp;than&nbsp;the&nbsp;conventional&nbsp;ADRC.&nbsp;The&nbsp;presented&nbsp;micro-motion&nbsp;stage&nbsp;based&nbsp;on&nbsp;stiffness-adjustable&nbsp;flexure&nbsp;hinges&nbsp;and&nbsp;MADRC&nbsp;design&nbsp;is&nbsp;capable&nbsp;to&nbsp;meet&nbsp;the&nbsp;industrial&nbsp;application&nbsp;requirements&nbsp;oflarge&nbsp;stroke&nbsp;or&nbsp;variable&nbsp;working&nbsp;conditions.</p>

A Novel Micro-Positioning Stage With Large-Stroke and Adjustable Stiffness

Paper Proceedings: https://asmedigitalcollection.asme.org/IDETC-CIE/IDETC-CIE2021/volume/85369

ASME 2021 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE2021)

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