As next-generation electronic components such as high-density semiconductors and high-capacity secondary batteries emerge, high-quality and high-speed laser machining technologies are increasingly required. In the case of using an optical scanner system, high-speed machining is possible, but there is a disadvantage that high-quality machining is difficult because the laser beam cannot be highly focused. On the other hand, in the case of a highly focus laser machining using objective lenses, high-speed machining is impossible due to the weight of the moving part. In this study, an xy-stage is proposed that enables high-speed and high-focused laser machining by moving a laser head or objective lenses and reflectors.To enhance the acceleration performance of an xy-stage, it is necessary to reduce the weight of the moving part. Unlike conventional xy-stages, in the proposed mechanism, only moving parts (armature) of each x-axis and y-axis actuator are connected to the final moving part (stage) through two perpendicularly-installed linear motion guides. This mechanism makes the moving parts much lighter regardless of the moving direction, so that a higher acceleration rate is possible.If whole reaction force of the actuator output thrust is applied to the base frame, it causes vibration of the base frame. In order to resolve this problem, the proposed xy-stage adapted a counterbalance mechanism.For performance evaluation, a sheet metal was machined with a laser head installed on the moving part. When machining 300 µm diameter holes, the roundness error was less than 20 µm. The maximum acceleration of the moving part was 20 m/s2 and the laser-machining speed was 11.5 mm/s.

A High-Speed, Short-Stroke Xy-Stage With Counterbalance Mechanisms for Highly Focused Laser Machining

Paper Proceedings: https://asmedigitalcollection.asme.org/ISPS/ISPS2021/volume/84799

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