An interest in developing novel precursors for high temperature protective coatings led to the exploration of boron alkoxide compounds. As literature reveals, the structure of the [B(OR)3] (OR = OC6H5, OC6H4(C6H5)-2) and the fluorinated ligands (OC6H4(CF3)-4, OC6H3(CF3)2-3,5, OC6F5) are monomeric trigonal structures, which may make them useful for metalorganic chemical vapor deposition (MOCVD) process. Therefore, the synthesis of a series of aryloxide with varied steric bulk was undertaken to explore and tune their volatility. Several routes were explored with the most successful found to be the reaction of BCl3 with the alcohol, including phenol (H-OPh), 2-methyl phenol (H-oMP), 2-iso-propyl phenol (H-oPP), 2-tert-butyl phenol (H-oBP), 2,6-di-methyl phenol (H-DMP), 2,6-di-iso-propyl phenol (H-DIP), 2,6-di- tert-butyl phenol (H-DBP), 2,4,6 tri-chloro- phenol (H-oMP). The products that were crystallographically were also found to be monomeric [B(OR)3]. The samples were analyzed by a variety of analytical measurements using FTIR spectroscopy, NMR, and elemental analyses and explored for MOCVD applications. Full details of the synthesis, characterization, and properties of these compounds will be presented.

Synthesis and characterization of a series of boron aryloxides for MOCVD applications

ACS Spring 2022

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