In this study, the microstructure and adhesion properties of silicon-incorporated diamond-like carbon coatings on polyethylene and silicon substrates. The coatings were deposited using a plasma enhanced chemical vapor deposition approach. The microstructure of the coatings was evaluated using transmission electron microscopy. The presence of tetrahedral bonding in coatings was assessed with Raman spectroscopy. The sessile drop method was used to obtain contact angle measurements from the coatings. Microscratch testing was used to understand the adhesion of silicon-incorporated diamond-like carbon coatings to polyethylene and silicon substrates and the effect of reactive ion etching to the adhesion properties of the coating. The results of these efforts showed that the utility of microscratch testing for making qualitative comparisons of adhesion properties of silicon-incorporated diamond-like carbon coatings coatings.

Adhesion of plasma enhanced chemical vapor deposition grown hard carbon films

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ACS Fall 2022

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