Molybdenum dithiocarboxylato complexes of the type Mo(S2CR)4 were evaluated for their performance as single-source precursors for the aerosol-assisted chemical vapor deposition (AACVD) of thin films of the transition metal dichalcogenide (TMD) molybdenum disulfide (MoS2). The decomposition properties of the precursors will be discussed in the context of pyrolysis, thermogravimetric analysis, and mass spectrometry. Results from AACVD experiments will be presented using data obtained from Raman spectroscopy, SEM, EDX, XPS, and GIXRD.

Evaluation of molybdenum dithiocarboxylato complexes as precursors for the aerosol-assisted chemical vapor deposition of MoS2

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