Focused electron beam-induced deposition (FEBID) is a state-of-the-art nanofabrication technique for the deposition of well-defined materials at nanometer-length scales. Precursor design for these techniques aims to minimize the organic contamination and increase the metal content in the final deposit. We describe the synthesis and characterization of Fe and Ru tetracarbonyl olefin complexes as possible precursors for FEBID of metal nanostructures. To get insights into their charged particle-induced dissociation mechanisms, we have performed gas phase mass spectrometry studies and estimated the average ligand loss per incident.

Metal olefin carbonyl complexes as organometallic precursors for focused electron beam-induced deposition

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