In this presentation, I will highlight collaborative research with Prof. May Nyman on small inorganic clusters and how our findings advanced the chemistry of inorganic photoresists to address roadblocks in small-scale patterning and EUV photolithography.

Small clusters and high-density patterning

Where thousands of chemistry professionals meet to share ideas and advance scientific and technical knowledge. Spring 2023 abstracts, posters, and presentations will launch at the end of March.

ACS Spring 2023

The official archive and repository for all ACS Meetings & Expositions abstracts and select posters or presentations.